Integrated Internal Vapor Analysis (IVA) and TDS System ESCO-TDS1200II PKG
ESCO-TDS1200II PKGKey Features
This advanced system features integrated IVA (Internal Vapor Analysis) capabilities seamlessly connected to the core ESCO-TDS1200II IR platform.
Micro-Device Internal Gas Analysis The IVA functionality enables the precise measurement and quantification of internal gas content—most notably moisture—trapped inside micro-devices that are hermetically sealed with ceramics, metals, or glass.
Broad Range of High-Tech Applications Key target applications include critical electronic components such as compound semiconductors, laser diodes, crystal oscillators, SAW (Surface Acoustic Wave) filters, as well as various specialized lamps.
Shared High-Performance Gas Detection Unit
The gas detection section utilizes the exact same high-performance shared unit as the base ESCO-TDS1200II IR system, ensuring identical calibration, reliability, and data consistency across different testing modes.
End-to-End Evaluation Across Semiconductor Processes This dual capability offers a complete, cross-process evaluation workflow for semiconductor manufacturing.
For instance, thin-film materials used in the front-end processes can be rigorously evaluated using the TDS function, while the internal gases within finalized devices packaged during the back-end processes can be evaluated using the IVA function.
