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ESCO-TDS1200Ⅱ IR
Infrared Heating Thermal Desorption Spectrometer
The Industry Standard for Thin Film Outgassing Analysis
Under ultra-high vacuum conditions
(10–7Pa or lower), CVD and ALD films are heated using infrared radiation, and the desorbed molecules are detected in real-time with high sensitivity using a quadrupole mass spectrometer (QMS).
It enables highly sensitive detection of trace amounts of hydrogen and water equivalent to a single monolayer. Quantitative analysis is also possible.
NEW ESCO-TDS1200Ⅱ IR BGM
Thermal Desorption Spectrometer with Integrated Bandgap Monitor
Enabling High-Precision Silicon Temperature Measurement
The bandgap monitor optically measures the wafer surface temperature directly.
It maintains high controllability even during rapid heating. This is a high-end model optimal for precise desorption temperature evaluation.
ESCO-TDS1200Ⅱ IR PKG
Integrated Internal Vapor Analysis (IVA) and TDS System
Supports both TDS analysis and residual gas analysis (RGA/IGA/IVA) of hermetically sealed packages.
A composite system that performs both residual gas analysis (RGA/IGA/IVA) of hermetically sealed packages and TDS analysis of thin film materials in a single unit. It precisely conducts qualitative and quantitative analysis of the gas inside packages, which affects the reliability of laser diodes, mercury devices, MEMS, etc. It enables consistent evaluation from front-end to back-end processes.
NEW ESCO-TDS600 IR H2
Thermal Desorption Hydrogen Analyzer
Hydrogen Embrittlement Evaluation Model (Precise Hydrogen Detection via Mass Spectrometry)
Combines the ease of use comparable to gas chromatography with the quantitative capabilities of a mass spectrometry (vacuum) system. Achieves simple operation by eliminating the need for vacuum transfer of samples. Powerfully supports everything from quality control on the manufacturing floor to research and development.
【Under Development】
ESCO-TDS-100 Cryo H2
Cryogenic Diffusible Hydrogen Analyzer
Supports low-speed heating (1°C/min) starting from -100°C.
This L-TDS (Low-temperature Thermal Desorption Spectrometer) is optimal for analyzing hydrogen trapped at lattice defects. It enables the separated detection of hydrogen at various defect sites (grain boundaries, dislocations, vacancies, etc.) in metal materials. With thorough anti-frost measures, it powerfully supports advanced hydrogen trap site analysis.
ESCO-TDS1700 IH
Induction Heating Thermal Desorption Spectrometer
Enabling Material Evaluation at Ultra-High Temperatures up to 1700°C
Equipped with induction heating (IH), supporting ultra-high temperature measurements up to 1700°C. Ideal for evaluating high-temperature materials (heat-resistant materials) such as refractory metals, ceramics, and carbon.
Development and Manufacturing of Custom Equipment
Applying the technology cultivated through TDS, we undertake the contract development of a wide variety of custom-built systems. Although many are undisclosed due to confidentiality agreements, we introduce some development examples that can be released to the public.
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