−How to Start the Device−

Device startup

❶We will conduct a pre-check.
・The ground fault circuit interrupter is OFF.
・Compressed air is supplied. (0.01 to 0.02 MPa)
・The RP1 switch is OFF.

❷Turn the breaker on the back of the device to the ON position.

❸Press the RESET switch on the front panel of the device.

Main Chamber Exhaust System Activation

❶We will conduct a pre-check.
・The main chamber is closed, and the equipment is properly installed.
・The main chamber vent valve is closed.
・The AUTO/MANUAL switch is set to MANUAL.
・The MV, VV, RV, and GV switches are set to CLOSE.
・The RP1 switch is OFF.
・The RP1 vent valve is closed.
・Nitrogen gas for venting and compressed air for valve actuation are supplied. (0.01 to 0.02 MPa)
・The main chamber pressure is at or above atmospheric pressure.

❷Press the ON switch on RP1 to start it up.

❸Press the OPEN switch on BV1 to perform coarse grinding of the main chamber.
Wait until the exhaust noise subsides. (Approximately 1 minute)

❹Press the START switch on the TMP1 controller to start the TMP1.
Wait until TMP1 returns to normal operation. (Approximately 10 minutes)

❺Press the vacuum gauge's ON switch to turn on the power, then press the IG1 switch to light the filament.

❻Open the nitrogen purge valve to supply purge nitrogen to TMP1.

❼Wait until the main chamber pressure falls below 1E-5 Pa, then turn on the mass spectrometer.

Activation of the Load Lock Chamber Exhaust System

❶We will conduct a pre-check.
・The sample inlet is closed and the instrument is properly installed.
・The AUTO/MANUAL switch is set to MANUAL.
・The MV, VV, RV, and GV switches are set to CLOSE.
・The RP2 switch is set to OFF.
・Nitrogen gas (vent gas) and compressed air (for valve actuation) are supplied.
・The RP2 vent valve and TMP2 vent valve are closed.

❷Press the ON switch on RP2 to start RP2 and begin exhausting the rear side of TMP2.
Wait until the exhaust noise subsides.
※BV2 will open automatically, supplying power to the TMP2 controller.

❸Press the START switch on the TMP2 controller to start the TMP2.
Wait until normal operation is established. (Approximately 10 minutes)

❹ Set the RV switch to OPEN to begin coarse grinding.
Wait until coarse grinding of the load lock is complete. (Approx. 5 minutes)

❺Set the RV switch to CLOSE to close the RV.

❻Set the MV switch to OPEN, open the main valve, and begin venting via TMP2.

Notes
RP1: Rotary Pump 1
BV1: Backing Valve 1
TMP1: Turbo Molecular Pump 1
RP2: Rotary Pump 2
BV2: Backing Valve 2
TMP2: Turbo Molecular Pump 2
RV: Rotary Pump
MV: Main Valve

Push switches (depressed, illuminated) and toggle switches (up) indicate ON or OPEN.
Push switches (raised, unlit) and toggle switches (down) indicate OFF or CLOSE.

−How to Stop the Device−

Main Chamber Exhaust System Shutdown

❶After turning off the filament and SEM in the TDS measurement software or filament manager, turn off the power switch.

❷Turn off the vacuum gauge IG1 and disconnect the power supply.

❸Press the STOP switch on the TMP1 controller to stop the TMP1.

❹Press the CLOSE switch on BV1 to close the back valve.

❺Wait approximately 30 minutes until TMP1 stops.
Confirm the wing has stopped via the viewport.

❻Press the OFF switch on RP1 to stop RP1.

❼Open the RP1 vent valve and vent nitrogen from the RP1 suction side.
Once the flow meter float has dropped, close the RP1 vent valve.

Main chamber atmospheric venting

❶Position the pointed end of the standard gas/nitrogen switch valve (black knob) facing downward (toward the nitrogen line).

❷ Open the main chamber vent valve to vent nitrogen.
When nitrogen gas flows into the main chamber, the float in the nitrogen gas flow meter moves.

❸When the float in the nitrogen gas flow meter drops, close the main chamber vent valve.

❹Close the nitrogen purge valve to stop the supply of nitrogen for purging to TMP1.

Main Chamber Exhaust System Shutdown

❶Set the AUTO/MANUAL switch to MANUAL.

❷Set the MV switch to OPEN, open the main valve, and begin venting via TMP2.

❸ Set the VV switch to OPEN and vent the lock chamber with nitrogen.
When nitrogen gas flows into the load lock chamber, the float in the nitrogen gas flow meter moves.

❹Set the VV switch to CLOSE to close the VV.

❺Press the STOP switch on the TMP2 controller and wait approximately 10 minutes until the TMP2 stops.

❻ Press the OFF switch on the RP2 to stop the RP2.
Power supply to the TMP2 controller will automatically turn OFF, and a warning will appear on the LCD screen.
※ The LCD screen of the turbo molecular pump controller will continue to display for approximately 10 minutes after stopping rotation, even after power supply is turned OFF.

❼Open the RP2 vent valve and vent nitrogen from the RP2 intake side.
Close the RP2 vent valve once the float on the nitrogen gas flow meter has dropped.

Shut Down the Equipment

❶ Turn OFF the circuit breaker located on the rear of the equipment.

Notes

RP1: Rotary Pump 1
BV1: Backing Valve 1
TMP1: Turbo Molecular Pump 1
RP2: Rotary Pump 2
BV2: Backing Valve 2
TMP2: Turbo Molecular Pump 2
RV: Rotary Vacuum Pump
MV: Main Valve

Push switches (depressed, lit) and toggle switches (up) indicate ON or OPEN.
Push switches (raised, unlit) and toggle switches (down) indicate OFF or CLOSE.