TDS1200 and EMD-WA1000S/W Startup and Shutdown
−System Startup Procedures−
System Startup
❶ Pre-operational Checklist:
・The earth leakage circuit breaker (ELCB) is in the OFF position.
・Compressed air is being supplied (0.01 to 0.02 MPa).
・The RP1 switch is in the OFF position.
❷ Switch ON the primary circuit breaker located on the rear panel of the instrument.
❸ Press the RESET switch on the front control panel of the instrument.
Main Chamber Evacuation System Startup
❶ Pre-operational Checklist:
・The main process chamber is completely closed, and all components are properly installed.
・The main chamber vent valve is completely closed.
・The AUTO / MANUAL switch is set to MANUAL.
・The MV, VV, RV, and GV switches are all set to CLOSE.
・The RP1 switch is set to OFF.
・The RP1 vent valve is completely closed.
・Nitrogen gas for venting and compressed air for valve actuation are being supplied (0.01 to 0.02 MPa).
・The interior of the main chamber is at atmospheric pressure or higher.
❷Press the ON switch for RP2 to start Rotary Pump 2 and begin backing evacuation for TMP2.
Wait until the pumping exhaust sound subsides.
❸ Press the OPEN switch for BV1 to initiate rough pumping (roughing) of the main chamber.
Wait until the pumping exhaust sound subsides (approx. 1 minute).
❹ Press the START switch on the TMP1 controller to start Turbo Molecular Pump 1.
Wait until TMP1 reaches stable normal operation (approx. 10 minutes).
❺ Turn ON the power switch for the vacuum gauge, and press the IG1 switch to illuminate the ionization gauge filament.
❻ Open the nitrogen purge valve to supply purge nitrogen gas to TMP1.
❼ Wait until the main chamber pressure drops below 1E-5 Pa, then turn ON the primary power supply for the mass spectrometer.
Load-Lock Chamber Evacuation System Startup
❶ Pre-operational Checklist:
・The specimen introduction port is completely closed, and all components are properly installed.
・The AUTO / MANUAL switch is set to MANUAL.
・The MV, VV, RV, and GV switches are all set to CLOSE.
・The RP2 switch is set to OFF.
・Nitrogen gas (for venting) and compressed air (for valve actuation) are being supplied.
・The RP2 vent valve and TMP2 vent valve are completely closed.
❷Press the RP2 ON switch to start RP2 and begin exhausting the back side of TMP2.
Wait until the exhaust noise subsides.
Note: Backing Valve 2 (BV2) will automatically open, and primary power will be supplied to the TMP2 controller.
❸ Press the START switch on the TMP2 controller to start Turbo Molecular Pump 2.
Wait until it reaches normal operation (approx. 10 minutes).
❹Switch the RV switch to OPEN to initiate rough pumping.
Wait until the load-lock chamber roughing sequence is complete (approx. 5 minutes).
❺Switch the RV switch to CLOSE to close the roughing valve
❻ Switch the MV switch to OPEN to open the main valve and begin high-vacuum evacuation via TMP2.
Component Nomenclature Notes
RP1: Rotary Pump 1
BV1: Backing Valve 1
TMP1: Turbo Molecular Pump 1
RP2: Rotary Pump 2
BV2: Backing Valve 2
TMP2: Turbo Molecular Pump 2
RV: Roughing Valve
MV: Main Valve
Switch Logic Conventions:
・Push switches (depressed, illuminated) and toggle switches (UP position) signify ON or OPEN.
・Push switches (extended, extinguished) and toggle switches (DOWN position) signify OFF or CLOSE.
−System Shutdown Procedures−
Main Chamber Evacuation System Shutdown
❶ Turn OFF the mass spectrometer filament emission and deactivate the SEM voltage inside the TDS measurement software or via the hardware filament manager layout, then turn OFF the primary QMS power switch.
❷ Switch OFF the vacuum gauge IG1 and turn OFF the main gauge power supply.
❸ Press the STOP switch on the TMP1 controller to stop Turbo Molecular Pump 1.
❹ Press the CLOSE switch for BV1 to close Backing Valve 1.
❺ Wait approximately 30 minutes until TMP1 comes to a complete physical standstill.
Visually confirm through the viewport window that the rotor blades have stopped spinning.
❻ Press the OFF switch for RP1 to stop Rotary Pump 1.
❼ Open the RP1 vent valve to nitrogen-vent the intake side of RP1.
Once the flowmeter float drops completely, close the RP1 vent valve.
Venting the Main Chamber to Atmospheric Pressure
❶ Direct the pointed end (arrow side) of the standard gas / nitrogen selector valve (black knob) downward toward the nitrogen line side.
❷ Open the main chamber vent valve to introduce nitrogen vent gas.
The float of the nitrogen gas flowmeter will move as nitrogen gas flows into the main chamber.
❸ Once the nitrogen gas flowmeter float drops completely, close the main chamber vent valve.
❹ Close the nitrogen purge valve to isolate the supply of purge nitrogen gas to TMP1.
Load-Lock Chamber Evacuation System Shutdown
❶ Switch the AUTO / MANUAL switch to MANUAL.
❷ Switch the MV switch to OPEN to open the main valve and ensure evacuation continues via TMP2.
❸ Switch the VV switch to OPEN to introduce a nitrogen vent into the load-lock chamber.
The float of the nitrogen gas flowmeter will move as nitrogen gas enters the load-lock chamber.
❹ Switch the VV switch to CLOSE to close the vent valve.
❺ Press the STOP switch on the TMP2 controller and wait approximately 10 minutes until TMP2 comes to a complete physical standstill.
❻ Press the OFF switch for RP2 to stop Rotary Pump 2.
Note: Power supply to the TMP2 controller will automatically turn OFF, and a warning message will be displayed on its liquid crystal display (LCD) screen.
Technical Note: The LCD screen of the turbo molecular pump controller will remain illuminated for approximately 10 minutes after power isolation until rotation fully ceases.
❼ Open the RP2 vent valve to nitrogen-vent the intake side of RP2.
Once the nitrogen gas flowmeter float drops completely, close the RP2 vent valve.
System Shutdown
❶ Switch OFF the primary circuit breaker located on the rear panel of the instrument.
Component Nomenclature Notes & Switch Logic Conventions
RP1: Rotary Pump 1
BV1: Backing Valve 1
TMP1: Turbo Molecular Pump 1
RP2: Rotary Pump 2
BV2: Backing Valve 2
TMP2: Turbo Molecular Pump 2
RV: Roughing Valve
MV: Main Valve
Switch Logic Conventions:
・Push switches (depressed, illuminated) and toggle switches (UP position) signify ON or OPEN.
・Push switches (extended, extinguished) and toggle switches (DOWN position) signify OFF or CLOSE.
