−Baking−

Installing the Insulation Jacket

❶ Turn OFF the SEM and filament of the mass spectrometer (QMS) via the software.

❷ Turn OFF the QMS power from the touch panel.

❸ Disconnect the power cable and communication cable connected to the QMS controller.

❹ Use a hex wrench to loosen the mounting screws and remove the QMS controller.

❺ Check the mounting condition of the temperature sensor.

❻ Attach protective covers to each viewing port.

❼ Remove the upper thermocouple lead-in terminal connector.

❽Install the insulated jacket.
The insulation jacket consists of two parts: the main chamber section and the sample transfer mechanism section. The insulation jacket for the main chamber section is installed by covering it from the front of the device and securing it with the rear and top hook-and-loop fasteners. The rear section houses the main chamber vacuum gauge sensor (IG) and the turbo molecular pump, with limited clearance, so install it carefully.

Baking Settings

❶ Set the baking time or end date/time using the touch panel.

❷ Press the Start button to begin.

❸ Following these steps starts baking, heating to the set temperature.

❹ When the set time or date is reached, power to the heater is cut off.

Post-Baking Processing

❶ Wait until the temperature drops to near room temperature.

❷ Remove the insulation jacket, attach the QMS controller, connect the wiring, and return all parts to their original positions.

Rotary Pump (RP) Oil Change Procedure
We recommend changing the rotary pump oil annually.

❶ Shut down the device according to the manual.

❷ Verify the RP unit is cool.

❸ Remove the quick clamp and metal connector.

❹ Open the oil fill port.

❺ Prepare the oil drain plug to prevent spillage, then open it. Be careful as oil will flow out rapidly.

❻ Once all oil has drained, close the oil drain plug.

❼ Pour the specified amount of oil into the oil filler port.

❽ Close the oil filler port and reassemble in reverse order.

Precautions

●Used oil may contain highly toxic substances. Wear protective eyewear and oil/chemical-resistant gloves during replacement.
●Place protective sheeting on the floor to prevent oil from scattering when lowering the RP.
●Immediately after stopping the RP, the oil may be hot and could cause burns.
●Dispose of oil properly.
● Never use oil other than that supplied by our company or genuine manufacturer oil.
● Handle with care as this is heavy equipment; be vigilant against dropping during operation.
● Only personnel thoroughly familiar with the replacement procedure should perform the oil change.