Scheduled Maintenance & Complete System Overhaul
We provide scheduled maintenance and complete system overhaul services for our instrumentation users. Please refer to the service items listed below.
No.001: Preliminary System Diagnostic Inspection
| Frequency | Frequency |
|---|---|
| Standard Duration | 4.0 Hours |
| Required Parts / Exchange Components | Complete Verification Specimen Set |
| Notes | A comprehensive check of the current system baseline states will be performed. |
No.002: Infrared Lamp Assembly Replacement
| Frequency | Frequency |
|---|---|
| Standard Duration | 0.5 Hours |
| Required Parts / Exchange Components | Quartz Infrared Lamp Module [Quantity: 1] |
| Notes | Specific components vary depending on the system specifications. |
No.003: Foreline Trap Element Replacement
| Frequency | Annually |
|---|---|
| Standard Duration | 0.5 Hours |
| Required Parts / Exchange Components | Trap Element Insert (Ref: 20-H026-00-050) [1 Can] |
| Notes | Specific components vary depending on the system specifications. |
No.004: Rotary Pump (RP) Oil Replacement
| Frequency | Every 6 months |
|---|---|
| Standard Duration | 2.0 Hours |
| Required Parts / Exchange Components | Exchange Components: Premium Vacuum Grade Rotary Pump Oil |
| Notes | Specific components vary depending on system specifications and pump manufacturer. |
No.005: Heating Specimen Stage Replacement
| Frequency | Annually |
|---|---|
| Standard Duration | 2.0 Hours |
| Required Parts / Exchange Components | : High-Purity Quartz Stage, Calibrated Thermocouple, ICF Metal Gaskets |
| Notes | Specific components vary depending on the system specifications. |
No.006: Main Heating Chamber Cleaning
| Frequency | Annually |
|---|---|
| Standard Duration | 0.5 Hours |
| Required Parts / Exchange Components | ICF Metal Gaskets |
| Notes | None |
No.007: Load-Lock Chamber Cleaning
| Frequency | Every 2 Years |
|---|---|
| Standard Duration | 3.0 Hours |
| Required Parts / Exchange Components | Exchange Components: ICF Metal Gaskets |
| Notes | None |
No.008: Specimen Transfer Mechanism Leaf Spring Replacement
| Frequency | Every 2 Years |
|---|---|
| Standard Duration | 1.0 Hour |
| Required Parts / Exchange Components | Precision Leaf Springs, Gaskets |
| Notes | None |
No.009: Infrared Optical Entrance Port Window Polishing
| Frequency | Every 2 Years (Depending on mechanism contamination levels) |
|---|---|
| Standard Duration | 1.0 Hour |
| Required Parts / Exchange Components | Gaskets |
| Notes | None |
No.010: Turbo Molecular Pump (TMP2) Bearings Replacement
| Frequency | Every 3 Years |
|---|---|
| Standard Duration | 3.0 Hours |
| Required Parts / Exchange Components | Bearings, Gaskets |
| Notes | Specific components vary depending on the system specifications. |
No.011: Exhaust Line Oil Mist Filter Replacement
| Frequency | Every 4 Years (Depending on contamination levels) |
|---|---|
| Standard Duration | 0.5 Hours |
| Required Parts / Exchange Components | Filter Element |
| Notes | None |
No.012: Main UHV Gate Valve Replacement
| Frequency | Every 4 Years |
|---|---|
| Standard Duration | 4.0 Hours |
| Required Parts / Exchange Components | Gate Valve, Gaskets |
| Notes | Highly dependent on cumulative system usage frequency. |
No.013: Rotary Backing Pump Replacement
| Frequency | Every 5 Years |
|---|---|
| Standard Duration | 2.0 Hours |
| Required Parts / Exchange Components | Rotary Vane Vacuum Pump, Vibration Isolation Rubber Mounts |
| Notes | None |
No.014: QMS Mass Alignment & Resolution Adjustments
| Frequency | Annually |
|---|---|
| Standard Duration | 2.0 Hours |
| Required Parts / Exchange Components | Certified Calibration Reference Standard Gas Mix |
| Notes | None |
No.015: QMS Ionization Source Assembly Replacement
| Frequency | Every 2 Years (Depending on contamination levels) |
|---|---|
| Standard Duration | 2.0 Hours |
| Required Parts / Exchange Components | Factory Ionizer Block, Gaskets |
| Notes | None |
No.016: Vacuum System Pumpdown & Chamber Baking Routine
| Frequency | Annually |
|---|---|
| Standard Duration | 2.0 Hours |
| Required Parts / Exchange Components | None |
| Notes | None |
No.017: Post-Overhaul Performance Verification Testing
| Frequency | Annually |
|---|---|
| Standard Duration | 5.0 Hours |
| Required Parts / Exchange Components | Complete Verification Specimen Set |
| Notes | Mandatory protocol executed whenever system maintenance is performed. |
No.018: QMS Calibration Curve Verification Measurement
| Frequency | Monthly |
|---|---|
| Standard Duration | 1.0 Hour |
| Required Parts / Exchange Components | Ion-Implanted Silicon Wafer |
| Notes | Performed after conducting a system chamber bakeout for more than 24 consecutive hours. |
No.019: QMS Matrix Characteristic Correction Measurement
| Frequency | Annually |
|---|---|
| Standard Duration | 3.0 Hours |
| Required Parts / Exchange Components | Ion-Implanted Silicon Wafers (Multi-Species) |
| Notes | Performed after conducting a system chamber bakeout for more than 24 consecutive hours. |
