Troubleshooting Guide
The vacuum level in the load-lock chamber does not improve.
If the vacuum level changes when you manually press down on the specimen exchange window, particulates or debris may be adhered to the O-ring of the specimen exchange window. Please remove any debris from the O-ring.
The vacuum level will also fail to improve if there is a large volume of outgassing from the specimen.
The load-lock vacuum gauge does not display readings.
The volume of N2 inside the load-lock chamber is insufficient, making it difficult for the vacuum gauge discharge to initiate. Please execute the following procedure
1. Set the [AUTO/MANU] selector switch to MANU.
2. Set the [MV] switch to CLOSE.
3. Set the [VV] switch to OPEN, wait for 5 seconds, and then set it to CLOSE.
4. Set the [RV] switch to OPEN.
5. Once the red LED on the rear of the Pirani vacuum switch illuminates, set the [RV] switch to CLOSE.
6. Press the [HV] switch on the Penning vacuum gauge controller.
7. Once the vacuum reading appears on the display, set the [MV] switch to OPEN.
8. Press the [AUTO_RESET] switch, and then set the [AUTO/MANU] switch to AUTO.
Following this, proceed with the standard startup procedure.
The AUTO lamp does not illuminate.
Please execute the following procedure
1. Set the [AUTO/MANU] selector switch to MANU.
2. Set the [MV] switch to CLOSE.
3. Set the [RV] switch to OPEN.
4. Once the red LED on the rear of the Pirani vacuum switch illuminates, set the [RV] switch to CLOSE.
5. Ensure the [RV] switch is set to CLOSE.
6. Once the vacuum reading appears on the display, set the [MV] switch to OPEN.
7. Press the [AUTO_RESET] switch, and then set the [AUTO/MANU] switch to AUTO.
Following this, operate the system using the standard procedure.
The MV lamp does not illuminate.
Please execute the following procedure
1. Set the [AUTO/MANU] selector switch to MANU.
2. Set the [MV] switch to CLOSE.
3. Set the [RV] switch to OPEN.
4. Once the red LED on the rear of the Pirani vacuum switch illuminates, set the [RV] switch to CLOSE.
5. Ensure the [RV] switch is set to CLOSE.
6. Once the vacuum reading appears on the display, set the [MV] switch to OPEN.
7. Press the [AUTO_RESET] switch, and then set the [AUTO/MANU] switch to AUTO.
Following this, operate the system using the standard procedure.
A specimen has fallen into the TDS main chamber.
If the fallen object is a specimen with zero outgassing (for example, a specimen that has already been ramped to a high temperature), it can be retrieved during the next complete system overhaul.
It will have no impact on ongoing measurements.
However, if vacuum evacuation performance degrades after the specimen falls, or if abnormal signals are detected during stage bakeout operations, you must immediately remove the fallen specimen.
The vacuum level in the TDS main chamber does not improve.
Please perform a degas routine for approximately 30 seconds to clean the vacuum gauge sensor. If the issue persists, a full chamber bakeout or manual cleaning will be required.
Powder samples scattered during the purging process.
Disassembly and cleaning of the load-lock chamber are required. Leaving this unaddressed may cause the powder to adhere to various valves, potentially leading to vacuum leaks.
For WA1000S and WA1000S/W models, an additional dedicated purge line optimized for powder samples can be retrofitted.
Alternatively, by connecting the purge line components in the order of purge valve to needle valve, you can restrict the purge flow rate using the needle valve to perform purging without scattering the powder.
The infrared controller does not power on.
The pressure or flow rate of the cooling water may be insufficient; please verify the facility cooling lines.
Alternatively, a fuse may be blown. In that case, the fuse (15A) and the infrared lamp assembly must be replaced.
The evacuation performance is poor despite achieving a good ultimate vacuum.
The performance of the rotary pump may have degraded. Please perform routine maintenance such as pump fluid replacement.
Although the recommended reference interval for rotary pump oil replacement is once per annum, degradation can occur sooner depending on the type and volume of desorbed gases handled.
The instrument has been shut down; should a system bakeout be conducted?
We recommend performing a system bakeout for 12 hours or longer.
During the bakeout operation, ensure the QMS is turned OFF (power isolated). Once the bakeout is complete and the QMS filament is re-illuminated, please wait for at least 3 hours before initiating any analytical measurements.
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