ESCO-TDS1700 IH Startup and Shutdown
System Startup
❶ Turn ON the Circuit Breaker
Switch the primary electrical circuit breaker located on the lower rear panel plate of the system housing to the ON position.
Startup Button❷System Initialization / Start Up
Press the "Start Up" button on the touch panel interface. The system automation platform executes an internal 10-second background diagnostics track to query sensor integrity.
If zero fault flags return, the display switches directly into the primary "Startup / Shutdown" operational layout page.
Touch Panel❸System Activation / 起動
Press and hold the System Active button on the touch-screen interface continuously for 3 full seconds. The interior Programmable Logic Controller (PLC) initiates the automatic startup sequence macro,
cycling and modulating vacuum pumps and multi-stage line valves under automated control.
・When the visual feedback display for the main process chamber prints "Normal Operation", the main chamber initialization is complete.
・When the load-lock cell feedback registers "Normal Operation", the load-lock chamber initialization is complete.
 Caution |
Before activating any system startup operations, operators must physically confirm that nominal electricity runs, nitrogen purge gas pressures,and instrument-grade compressed air supply lines are active and stable. |
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System Shutdown
❶Deactivate the QMS Filament
Turn OFF the mass spectrometer filament emission and turn OFF the SEM voltage parameter directly inside the TDS measurement software console or via the dedicated hardware filament manager layout.
❷ System Deactivation
Press and hold the primary Shutdown interface key on the touch panel startup/shutdown tab continuously for 3 full seconds. The embedded PLC automation framework overrides system states
and commands the safe shutdown sequence macro, systematically isolating gate valves and spinning down vacuum pumps under automated control parameters.
・When the main process chamber status output prints "Stopped", the main chamber shutdown is complete.
・When the load-lock cell feedback registers "Stopped", the load-lock chamber shutdown is complete.
| Note | A main Turbo Molecular Pump (TMP1) requires at least 20 minutes of unpowered spin-down time to come to a complete physical standstill. |
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| Triggering the automated shutdown macro completely severs logic power to the QMS analytical deck instantly. |
❸ Turn OFF the Circuit Breaker
To isolate the electrical supply to the system, manually switch the primary circuit breaker switch on the lower rear panel plate to the OFF position.
Turning OFF the circuit breaker completely severs power to the touch panel interface and PLC logic supplies.
| Note | Turning OFF the circuit breaker resets and initializes the volatile memory buffers of the Induction Heating (IH) temperature control PID loops. Other custom operational tracking metrics and numerical values will also be initialized. |
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