ESCO-TDS1200Ⅱ IR Startup and Shutdown
System Startup
❶ Turn ON the Circuit Breaker
Switch the primary electrical circuit breaker positioned on the lower rear panel plate of the system housing to the ON position.
Startup Button❷System Initialization (Start Up)
Press the "Start Up" button link on the touch panel interface. The system automation platform executes an internal 10-second background diagnostics track to query sensor integrity.
If zero fault flags return, the display switches directly into the primary "Startup / Shutdown" operational layout page.
Touch Panel❸System Activation
Press and hold the "System Active" button link on the touch-screen interface continuously for 3 full seconds. The interior Programmable Logic Controller (PLC)
initiates the automatic startup sequence macro, cycling and modulating vacuum pumps and multi-stage line valves under automated closed-loop rules.
・When the visual feedback display for the main process chamber prints "Normal Operation", the main chamber initialization is complete.
・When the load-lock cell feedback registers "Normal Operation", the load-lock chamber initialization is complete.
(Caption: Touch Panel)
 Caution |
Before activating any system startup macros, operators must physically confirm that nominal electricity runs, nitrogen purge gas pressures, and instrument-grade compressed air supply lines are active and stable. |
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System Shutdown
❶Deactivate the QMS Filament
Turn OFF the mass spectrometer filament emission and ramp down the SEM voltage parameter directly inside the TDS measurement software console or via the dedicated hardware filament manager layout.
❷ System Deactivation
Press and hold the primary "Shutdown" interface key on the touch panel startup/shutdown tab continuously for 3 full seconds.
The embedded PLC automation framework overrides system states and commands the safe shutdown sequence macro, systematically isolating gate valves and spinning down high-vacuum pumps under automated decay timelines.
・When the main process chamber status output prints "Stopped", the main chamber shutdown is complete.
・When the load-lock cell feedback registers "Stopped", the load-lock chamber shutdown is complete.
| Note | A main Turbo Molecular Pump (TMP1) requires at least 20 minutes of unpowered spin-down time to come to a complete physical standstill. |
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| Triggering the automated shutdown macro completely severs logic power to the QMS analytical deck instantly. |
❸ Turn OFF the Circuit Breaker
To isolate the hardware array from the facility grid infrastructure, manually snap the lower rear panel circuit breaker switch to the OFF position. Isolating the main rear circuit breaker completely severs power to the touch panel interface and PLC logic supplies.
