−Baking−

Installing the Insulation Jacket

❶ Turn OFF the SEM and filament of the mass spectrometer (QMS) via the software.

❷ Press the QMS Power switch to turn OFF the QMS power.

❸ Disconnect the power cable and communication cable connected to the QMS controller.

❹ Use a hex wrench to loosen the mounting screws and remove the QMS controller.

❺ Check the mounting condition of the temperature sensor.

❻ Attach protective covers to each viewing port.

❼ Remove the upper thermocouple lead-in terminal connector.

❽ Install the insulation jackets.
There are two insulation jackets: one for the main chamber section and one for the sample transfer mechanism section.
For the main chamber section insulation jacket, place it over the front side of the device and secure it with the rear and top hook-and-loop fasteners.
The rear section has limited clearance due to the main chamber vacuum gauge sensor (IG) and turbo molecular pump, so install it carefully.

Baking Controller Settings

❶ Set the baking time using the baking timer.

❷ Turn the baking controller power breaker ON.

❸ Press the Reset Start Switch.
Pressing the Reset Start Switch illuminates the lamp, supplies power to the baking temperature controller and baking timer, and resets the overheat indicator lamp.

These operations start the baking process, heating the oven to the temperature set on the temperature controller.
When the timer reaches its set time, power to the heater is cut off.

Operating the Baking Temperature Controller

❶ Press the Temperature Display Switch key to toggle between displaying the main chamber's current temperature and set temperature.

❷ While the set temperature is displayed, press the Set key (Up) or (Down) to change the setting.

❸ Press the Temperature Display Switch key to confirm the setting and display the current temperature.

Post-Baking Procedures

❶ Wait until the temperature drops to near room temperature, then turn OFF the baking controller's power breaker.

❷ Remove the insulation jacket, install the QMS controller, connect the wiring, and return all parts to their original positions.

Rotary Pump Oil Change Procedure

❶ Shut down the equipment according to the manual.

❷ Verify that the rotary pump (RP) body has cooled down.

❸ Remove the RP mounting nuts (4 locations), quick clamps, metal connectors, and thermal fuse, then lower the RP from the housing.

❹ Open the oil fill port.

❺ Prepare the oil drain plug to prevent spillage, then open it. Be careful as oil will flow out rapidly.

❻ Once all oil has drained, close the oil drain plug.

❼ Pour the specified amount of oil into the oil filler port.

❽ Close the oil filler port and reassemble in reverse order.

Important Notes

● Used oil may contain highly toxic substances. Wear protective eyewear and oil/chemical-resistant gloves during oil changes.
● Place a protective sheet on the floor to prevent oil from scattering when lowering the RP.
●Immediately after stopping the RP, the oil may be hot and could cause burns.
●Dispose of oil properly.
●Never use oil other than that supplied by our company or genuine manufacturer oil.
●This is heavy equipment; take care to prevent dropping during operation.
●Only personnel thoroughly familiar with the procedure should perform the oil change.