Samples containing metals prone to sublimation (metals with high vapor pressure).
When large amounts of metal are sublimated, it may deposit on QMS analysis tubes, vacuum gauges, and viewports, potentially causing performance degradation or failure.

Additionally, deposition occurs on the chamber walls and components, reducing the surface cleanliness of the chamber and increasing outgassing.
In such cases, cleaning the chamber walls or replacing components is necessary.
Particular caution is required with high-vapor-pressure elements like Zn and Mg, as they sublimate at low temperatures.

Examples of metals with high vapor pressure (Zn, Mg, Pb, In, Mn, Ga, Ag, Sn, Al, Cu, etc.)
Samples containing halogens.
When components containing halogens (especially fluorine) are released, the halogens can become trapped inside the main chamber or detector.
Samples containing organic compounds.
Heating large quantities of organic compounds above their decomposition temperature causes thermal decomposition, resulting in the dispersion of decomposition products that contaminate the main chamber and detector. This necessitates baking and cleaning the main chamber, as well as replacing parts.
Sample releasing large amounts of gas
Even if a sample's components do not contaminate the equipment, measuring samples that release gas in quantities exceeding the allowable pressure of the turbomolecular pump or QMS can cause failure of the turbomolecular pump or QMS.


When measuring samples that may be contaminated, it is recommended to perform a preliminary measurement.
・Slow the heating rate (approximately 10°C per minute).
・Use Bar mode or Scan mode.
・Minimize the sample amount.
・If any of the above components are detected, do not increase the temperature further.